- Instrument Introduction
The SGC-10 Thin Film Thickness Gauge is suitable for measuring the thickness of thin films and coatings used in dielectrics, semiconductors, thin-film filters, and liquid crystals. Developed in collaboration with New-Span Corporation of the United States, this instrument employs New-Span’s advanced thin-film thickness measurement technology. It utilizes the principle of white-light interference to determine the thickness and optical constants (refractive index n, extinction coefficient k) of thin films By analyzing the reflection spectrum formed by the coherent combination of light reflected from the film surface and the interface between the film and the substrate, the software performs fitting calculations to determine the thickness d, refractive index n, and extinction coefficient k of each layer in a single-layer or multi-layer film system. The key components of this equipment are imported from abroad, and the entire unit can also be imported upon customer request.
- Powerful Software Features
The user-friendly interface makes operation simple; users can complete measurements with just a few mouse clicks. The system offers convenient and fast functions for saving and loading measured reflectance spectra, along with powerful data processing capabilities. It can simultaneously measure the reflectance data of up to four film layers. A single measurement provides data such as the thickness and optical constants of each of the four film layers. The material library contains optical constant data for a wide range of common materials. Users can easily expand the material database themselves.
- 产品功能适用性
该仪器适用于多种介质，半导体，薄膜滤光片和液晶等薄膜和涂层的厚度测量。
- 典型的薄膜材料为
SiO2、CaF2、MgF、光刻胶、多晶硅、非晶硅、SiNx、TiO2、聚酰亚胺、高分子膜。
- 典型的基底材料为
SiGe、GaAs、ZnS、ZnSe、铝丙烯酸、蓝宝石、玻璃、聚碳酸酯、聚合物、石英。
仪器具有开放性设计，仪器的光纤探头可很方便地取出，通过仪器附带的光纤适配器（如图所示）连接到带C-mount适用于微区（>10μm，与显微镜放大率有关）薄膜厚度的显微镜（显微镜需另配），就可以使本测量仪测量。